| Spin Processors | | | | | |
| HL Series (HeadLess) | | | | | |
| H6-23 | spin coater | HL Series | ø150mm (5″ × 5″) | 12,000 rpm | Tabletop, On-Deck |
| H6-8 | spin coater | HL Series | ø200mm (7″ × 7″) | 12,000 rpm | Tabletop, On-Deck |
| H6-15 | spin coater | HL Series | ø300mm (9″ × 9″) | 12,000 rpm | Tabletop, On-Deck |
| 650 Series | | | | | |
| WS-650-23B | spin coater | 650 Series | ø150mm (5″ × 5″) | 12,000 rpm | Tabletop, In-Deck, On-Deck |
| WS-650-8B | spin coater | 650 Series | ø200mm (7″ × 7″) | 12,000 rpm | Tabletop, In-Deck, On-Deck |
| WS-650-15B | spin coater | 650 Series | ø300mm (9″ × 9″) | 12,000 rpm | Tabletop, In-Deck, On-Deck |
| EDC™ Series (Etch, Develop, Clean) | | | | | |
| EDC-650-23B | EDC System | 650 Series | ø150mm (5″ × 5″) | 12,000 rpm | Tabletop, In-Deck, On-Deck |
| EDC-650-8B | EDC System | 650 Series | ø200mm (7″ × 7″) | 12,000 rpm | Tabletop, In-Deck, On-Deck |
| EDC-650-15B | EDC System | 650 Series | ø300mm (9″ × 9″) | 12,000 rpm | Tabletop, In-Deck, On-Deck |
| Wet Stations | | | | | |
| WS-1000 | 4-foot Wet Station | 650 Series | 2x ø200mm (7″ × 7″) | 12,000 rpm | Station |
| WS-1000MH | 2-foot Wet Station | 650 Series | ø300mm (9″ × 9″) | 12,000 rpm | Station |
